EUV Lithography Planning Engineer

Who are we?

Inpria, a subsidiary of JSR Corporation, has an immediate opening for an EUV Lithography Planning Engineer based at IMEC, Leuven, Belgium.  We seek an enthusiastic and conscientious candidate to join our diverse and talented R&D team as we extend the limits of EUV Lithography. This role connects detailed experimental planning with day-to-day Fab execution. The successful candidate will plan EUV coat and exposure shifts, support operations while those shifts run, and keep each design of experiments (DOE) moving from proposal through summary.

Job content

EUV coat and exposure planning and coordination

  • Plan EUV coat and exposure sessions in detail, translating experimental objectives and conditions into practical, executable work.
  • Communicate and engage with local and global teams of production and R&D engineers
  • Collaborate closely with local operations, engineering and R&D, ensuring smooth execution.
  • Attend alignment meetings to discuss and confirm experimental details, priorities, timing, and readiness.
  • Serve as the designated technical point of contact during scheduled EUV coat and exposure slots, responding promptly to questions and execution issues.
  • Apply hands-on knowledge of EUV track and scanner systems to develop efficient, executable plans and anticipate constraints, dependencies, and potential execution problems.

Experimental Tracking and Data Quality.

  • Monitor the progress of experiments and follow up on outstanding actions through completion and reporting.
  • Follow up on experimental progress, data analysis, dependencies, and open actions, and communicate status and delays to the relevant teams.
  • Keep relevant planning and project tracking tools up to date and follow up on data completeness and quality, including SPC where applicable.

Who are you?

  • Master’s degree in a scientific discipline or equivalent professional experience
  • Hands-on understanding of EUV lithography operations, including track and scanner hardware and software, wafer handling, and the practical constraints of coat and exposure planning.
  • Strong attention to detail in DOE preparation, alignment, execution instructions, and status tracking.
  • Clear and effective written and verbal communication in English; comfortable supporting operators during shifts and working with senior engineering and R&D staff.
  • Collaborative, independent, and proactive, with the ability to prioritize work and follow through in a fast-paced environment.
  • Experience with EUV lithography tooling or statistical process control (SPC) is an advantage.

What can we offer you?

JSR Micro and Inpria welcome dedicated professionals who are passionate about their professional growth. We are committed to the development and advancement of each and every one of our employees. We understand that the only way to assure our growth and evolution as an organization is to support our employees as they strive to grow and evolve themselves. Knowledge, expertise, skills, and motivation help us accomplish our mutual goals.

In return we offer

  • Meal vouchers
  • Sports and culture vouchers
  • Eco vouchers
  • Group insurance
  • Hospitalization insurance including dental care
  • Annual individual bonus
  • Lease bike
  • A generous number of vacation days

Questions about this vacancy?

If you have any questions about this vacancy, you can contact our HR department directly. Fill out our contact form and you will receive an answer soon.